Intelligent Remote Plasma Source "Paragon®"
NF3 maximum flow rate 8 slm, improved process performance and lifespan with unique PEO plasma block design!
"Paragon (R)" has achieved more suitable data transfer and control for next-generation nano process development and manufacturing, based on the characteristics of the MKS low magnetic field toroidal plasma source with a proven track record in mass production. It supports CVD and ALD/ALE process chamber cleaning, achieving high analytical efficiency (>98%) even under conditions of 8 slm NF gas flow and a maximum pressure of 10 Torr. 【Features】 ■ Maximum NF flow rate of 8 slm, compact design for reduced cleaning time ■ Unique plasma block design with PEO coating improves process performance and lifespan ■ RoHS compliant, CE, S2, F47 *For more details, please refer to the PDF document or feel free to contact us.
- Company：日本エム・ケー・エス
- Price：Other
